JPH0153722B2 - - Google Patents

Info

Publication number
JPH0153722B2
JPH0153722B2 JP58018680A JP1868083A JPH0153722B2 JP H0153722 B2 JPH0153722 B2 JP H0153722B2 JP 58018680 A JP58018680 A JP 58018680A JP 1868083 A JP1868083 A JP 1868083A JP H0153722 B2 JPH0153722 B2 JP H0153722B2
Authority
JP
Japan
Prior art keywords
optical system
optical
light
surface roughness
angle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58018680A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59143909A (ja
Inventor
Narikata Oota
Hiroya Fukatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Original Assignee
Mitutoyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp
Priority to JP1868083A priority Critical patent/JPS59143909A/ja
Publication of JPS59143909A publication Critical patent/JPS59143909A/ja
Publication of JPH0153722B2 publication Critical patent/JPH0153722B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP1868083A 1983-02-07 1983-02-07 表面粗さ検出方法 Granted JPS59143909A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1868083A JPS59143909A (ja) 1983-02-07 1983-02-07 表面粗さ検出方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1868083A JPS59143909A (ja) 1983-02-07 1983-02-07 表面粗さ検出方法

Publications (2)

Publication Number Publication Date
JPS59143909A JPS59143909A (ja) 1984-08-17
JPH0153722B2 true JPH0153722B2 (en]) 1989-11-15

Family

ID=11978316

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1868083A Granted JPS59143909A (ja) 1983-02-07 1983-02-07 表面粗さ検出方法

Country Status (1)

Country Link
JP (1) JPS59143909A (en])

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5757496A (en) * 1997-03-07 1998-05-26 Mitutoyo Corporation Method of surface roughness measurement using a fiber-optic probe
US20140251533A1 (en) * 2013-03-11 2014-09-11 Samsung Display Co., Ltd. Substrate peeling device, method for peeling substrate, and method for fabricating flexible display device
CN103759675B (zh) * 2013-12-23 2016-07-06 中国兵器科学研究院宁波分院 一种用于光学元件非球面微结构的同步检测方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57163851A (en) * 1981-04-01 1982-10-08 Mitsutoyo Mfg Co Ltd Optical fiber
FR2531776A1 (fr) * 1982-08-13 1984-02-17 Commissariat Energie Atomique Procede et dispositif de determination sans contact de la rugosite d'une surface

Also Published As

Publication number Publication date
JPS59143909A (ja) 1984-08-17

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